PEEK silicon wafer rack

At Kriloha Ltd., we recognize that in semiconductor fabrication, the wafer rack is the primary guardian of your most valuable assets. Our PEEK Silicon Wafer Racks are our engineered answer for “Contamination-Free-Stability” and “High-Yield-Precision”. As a premier provider of customized PEEK solutions, Kriloha has developed a specialized manufacturing protocol to ensure that every rack meets the stringent purity standards of the modern clean-room.

The engineering of our wafer racks is founded on Geometry-Precision and Surface-Integrity. By utilizing multi-axis CNC machining, we eliminate the mold-flash and parting lines associated with standard injection molding, creating perfectly smooth slots that do not scratch or stress the wafer edges. At Kriloha, we verify the dimensional stability of every rack under thermal load, resulting in “Failure-Resistant” carriers that maintain their pitch and alignment through thousands of processing cycles.

Manufacturing these advanced clean-room components involves strict Particulate, Thermal, and Material Verification. We collaborate directly with your engineering teams to process bespoke rack sizes—from 2-inch to 300mm configurations—ensuring the carrier perfectly integrates with your automated handling systems. By choosing Kriloha Ltd., you are investing in a “Future-Proof” manufacturing partnership that optimizes your semiconductor yield through superior material performance.

Primary Use Cases

Semiconductor Wet Etching: Holding wafers securely during immersion in corrosive chemical baths where metal or lower-grade plastic racks would fail.
High-Temperature Baking & Curing: Supporting wafers during thermal processing and photoresist curing stages without warping or shedding particulates.
Ultra-High Vacuum (UHV) Transport: Transporting wafers within vacuum chambers where material purity and low outgassing are critical for yield.
Clean-Room Storage: Providing a stable, particulate-free environment for wafers between different stages of the fabrication process.
Automated Robotic Handling: Custom-designed interfaces that allow robotic arms to grip, load, and unload wafers with high repeatability and zero slippage.

Frequently Asked Questions

Why choose PEEK over PTFE (Teflon) for wafer racks?

While PTFE is chemically resistant, it is very soft and prone to “creeping” or deforming under heat and load. PEEK offers similar chemical resistance but provides the structural rigidity and hardness needed to keep wafers perfectly aligned without sagging over time.

Can these racks be used in Electrostatic Discharge (ESD) sensitive areas?

Yes. For applications where static buildup is a risk, we can manufacture the racks using ESD-grade PEEK (typically carbon-filled), which safely dissipates static charges while maintaining the material’s high-temperature and high-purity properties.

What is the maximum temperature these racks can withstand?

Our PEEK wafer racks maintain their structural integrity at continuous temperatures up to 250°C (482°F). They can also handle short-term exposure to temperatures reaching 300°C during specific curing or baking processes.

How does Kriloha ensure the slots don’t damage the wafers?

We use micro-machining and specialized polishing techniques to achieve a very low surface roughness (Ra) within the wafer slots. This minimizes friction and prevents the generation of micro-particulates during loading and unloading.

Are custom rack designs available for non-standard wafer sizes?

Absolutely. As a customization specialist, Kriloha can process racks for proprietary wafer sizes, square substrates, or unique carrier geometries based on your specific CAD designs and processing requirements.